Home Syllabus Lectures Readings
  • Sergey Edward Lyshevski, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, 2nd ed, 2005
  • Sergey Edward Lyshevski, MEMS and NEMS: Systems, Devices, and Structures, 2002
  • Atul Tiwari, Materials and Failures in MEMS and NEMS, 2015
  • Chang Liu, Foundations of MEMS, 2012
  • Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, 3rd ed, 2011
  • James D. Plummer, Silicon VLSI Technology: Fundamentals, Practice, and Modeling, 2000
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